1) scan distortion
扫描畸变
1.
This article introduces the reason why there s existing the distortions of the micro align models and explains what is cross distortion and scan distortion 340 and how to match the different "340".
叙述了340光刻机发生畸变的原因,并解释了什么是交叉畸变,什么是扫描畸变,并对如何进行两台340光刻机的匹配进行了探讨。
2) distortion of e-beam field
扫描场畸变
1.
The paper summarizes how many kinds of distortion of e-beam field, exhibits the project and the flow chart of automatic-correction program about the linear distorti-on.
本文通过对扫描电子束曝光机标记信号检测及对准技术的分析,提出了背散射检测电路的设计方案和电路原理图,给出了实验结果;总结了电子束扫描场畸变的种类,给出了线性畸变的自动校正软件的设计方案和流程图;介绍了非线性畸变校正的方法。
3) scan (sweep) positional distortion
扫描位置畸变
4) scan positional distortion
扫描定位畸变
5) line scanning waveform distortion
行扫描波形畸变
6) strain sweep
应变扫描
1.
In the strain sweep experiment, it was found that the critical strain applied to this waste liquor polymer solution was up to 0.
应变扫描实验得出甘蔗渣浆废液多聚物的临界应变达到0。
补充资料：扫描电子显微镜(见扫描电子显微术)
扫描电子显微镜(见扫描电子显微术)
scanning eleetron mieroseoPe
扫描电子显微镜scanning eleetron mieroseope见扫描电子显微术。
说明：补充资料仅用于学习参考，请勿用于其它任何用途。
参考词条