1) Stress-free Polishing
后CMP清洗
2) Post-CMP Cleaning
CMP后清洗
4) post-mounting flushing
安装后清洗
5) back spray rinsing
后喷<洗>清洗法
6) post-service cleaning
运行后的清洗
补充资料：5'-cmp
CAS: 63-37-6
分子式: C9H14N3O8P
熔点: 233℃
中文名称: 5'-胞(嘧啶核)苷酸；胞苷-5'-单磷酸一水物
英文名称: 5'-Cytidylic acid；5'-cmp；cmp (nucleotide)；cytidine 5'-(dihydrogenphosphate)；cytidine 5'-monophosphoric acid；cytidine 5'-phosphate；cytidine 5'-phosphoric acid；cytidine monophosphate；cytidylic acid
分子式: C9H14N3O8P
熔点: 233℃
中文名称: 5'-胞(嘧啶核)苷酸；胞苷-5'-单磷酸一水物
英文名称: 5'-Cytidylic acid；5'-cmp；cmp (nucleotide)；cytidine 5'-(dihydrogenphosphate)；cytidine 5'-monophosphoric acid；cytidine 5'-phosphate；cytidine 5'-phosphoric acid；cytidine monophosphate；cytidylic acid
说明：补充资料仅用于学习参考，请勿用于其它任何用途。
参考词条