As an example,detailed fabrication process of micro-mirror was provided.

Based on micro-electro-mechanical systems,a novel method employing bonding and wafer thinning technologies is proposed and demonstrated to fabricate torsion micromirror actuators with dimensions of 600[WTBZ]μ[WTB1]m×700[WTBZ]μ[WTB1]m.

The influence of edge effects on the static characteristics of a micromirror;

Novel design of comb-drive type micromirror;

A novel electrostatically driven torisional micromirror;

Design and analysis of a MEMS horizontal torsion micro mirror with folded springs;

Measurement of deflection angle performance of 1D torsion micro mirror;

Based on the electrostatic force computation formulas of the rectangle capacitor with edge effects,a nonlinear static characteristic model of a torsion micro mirror is developed,and the effecting of edge effects on the static characteristics and on the pull in characteristics is also analyzed.

The Measurement of Rotation Angle of Micro-mirror Using Fringe Projection;

Research on new type micro-mirror optical fiber hydrogen sensor;

A 500 μm×500 μm micro-mirror structure actuated by PZT piezoelectric cantilever beam was designed.

Hi-scope video microscope system for studies on structure of compact spun yarns;

Microscope in urine slime analyzer examination red blood cell application;

In vitro observation of ciliary activity of the tracheal membrane under a common light microscope;