Firstly,the photoresist was exposed by an overlapped increment scanning manner,and the distinct 3D structures were obtained after development.

Eight overlapped increment scanning exposure experiments were conducted on 1 μm PMMA in the JSM-35CF electron beam lithography system at 20 keV with 80 nm beam spot and 40 μC/cm2 single exposure dose.

The paper focused on the phenomenon of warp distortion and balling,simple analyzed the reasons for each other and then proposed a new scanning path generating algorithm,which is repeat scanning combined with subfield scanning.

A control method of electron beam scanning track and scanning mode was put forward, in which the curvilinear equations describing the electron beam scanning track were established according to the shape of the actual welding seam, the size of scanning region, scanning mode etc.

Under the conventional CT scanning mode, some specimens with the flat-type can t fulfill the CT reconfiguration because they are failing to get the complete projection being restricted by the rotated space or detector s dynamic scope.

Since 45°rotation scanning mirror is the most mature and common photo-mechanical scanning mode, having the wide range of applications in the satellite remote sensor.