1) vertical sidewall surface piezoresistor in plane
面内垂直侧壁表面压阻
2) sidewall piezoresistor in plane
面内侧壁压阻
1.
Based on the combination of theoretical analysis and finite element simulation,a sidewall piezoresistor in plane technique was proposed to fabricate piezoresistor sensor in the micro X-Y stage.
提出了一种面内侧壁压阻加工方法,成功地在定位平台上集成了压阻位移检测传感器。
3) sidewall piezoresistor
侧面压阻
1.
Based on the technology of the piezoresistive detection,an effective technique for fabricating vertical sidewall piezoresistors in planes is used to fabricate the piezoresistor in the end of the end-effectors.
以压阻检测技术为基础,利用MEMS侧面压阻刻蚀工艺将力传感器集成在微夹持器的夹持臂末端,实现夹持力的微力检测。
5) sidewall piezoresistors
侧壁压阻
6) vertical cylindrical surface
垂直园柱表面
补充资料：垂直面
1.与一条直线或一个平面相垂直的平面。
说明：补充资料仅用于学习参考，请勿用于其它任何用途。
参考词条