Based on the scanning principles,the relationship between scanning step and the characters of Gauss laser spot were expounded,The energy distribution of scanning field was analyzed,and the non-uniformity mainly depends on the stability of laser power,is about 3.

Beam quality of Gaussian beams passing through a spherically aberrated annular lens;

Parameter changes of Gaussian beams after passing through astigmatic lens;

Focusing Gaussian beams by annular lenses with spherical aberration;