1) processing chamber
工艺腔室
1.
We attempt to investigate the influence of the processing chamber configuration of an inductively coupled plasma(ICP)etcher on flow field characteristics.
为研究感应耦合等离子体(ICP)刻蚀机工艺腔室结构对流场特性的影响,采用回归正交设计方法对腔室半径、腔室高度、进气口半径以及进气流量4个设计参数进行试验设计,利用商业软件CFD-ACE+建立ICP刻蚀机工艺腔室二维流场仿真模型。
2) solution mining technology
造腔工艺
4) solution mining technique
溶腔工艺
1.
The quick-speed solution mining technique is expatiated which is suitable for a cylindrical development of the insoluble pocket in the deepest part of the cavern, moreover its practice effect is analyzed in application to the field.
为此,根据盐穴建造阶段的需要确定了以促溶工具为主的建槽期快速溶腔工艺方案,研制了喷嘴式促溶工具、延伸式喷嘴促溶工具和软管式促溶工具,并阐述了这3种促溶工具的结构、特点、工作原理及主要技术参数。
5) processing cell
工艺热室
6) Chamber Purging
工艺腔净化工艺
补充资料：采气工艺(见天然气开采工艺)
采气工艺(见天然气开采工艺)
gas production technology
，一‘J\匕乙吕天然气开采工艺pro以uetionteehnology)见
说明：补充资料仅用于学习参考，请勿用于其它任何用途。
参考词条