1) PH3 recirculation fumigation
PH3整仓环流
2) PH 3
PH3
1.
Special four component impregnated activated carbon as well as the semiconductor canisters packed with it has been developed to clean the exhaust H 2 stream containing AsH 3 and PH 3 in the metal organic compound vapor deposit (MOCVD) or metal organic vapor phase extent (MOVPE) processes in semiconductor field.
在半导体领域的金属有机物化学气相沉积 (MOCVD)过程中 ,排出含有剧毒AsH3 和PH3 的氢气 ,必须经过治理达标才能放空。
3) rectifying ring
整流环
1.
The fluid field in a gas distributor with a rectifying ring was measured with LDV.
采用激光多普勒技术测量了装有整流环的环形分布器中的流场 ,发现整流环外侧环形通道内存在大量循环气流 ,并呈变质量流动状态 ;整流环内侧环形通道中 ,循环流动基本消失 ,但仍存在较大的脉动速度 ,靠近内环射流孔处气体均匀径向流动为主。
4) adjusting circulation
环流调整
5) commutator ring
整流子环
6) commutator ring
整流器环
补充资料：整一
1.谓统一。
说明：补充资料仅用于学习参考，请勿用于其它任何用途。
参考词条