Model of MSMA linear actuator and its controlling system;

The operation principle of inchworm type MSM linear actuator as well as the design and control system of the actuator are introduced.

The structure of a new linear actuator of earthworm-like micro robot was introduced.

The snake-step linear actuator is constructed based on the integrated moving structure made by metal and the stack PZT, it can achieve the line-step moving of high accuracy and high reliability.

Based on different friction coefficients between touchable feet and touchable face when actuator moved toward right and left,a suit of inertial linear actuator driven by piezoelectric stack with changeable friction coefficients was designed and manufactured with piezoelectric stack and mass as power devices.

A fabricating technology for high energy density micro electromagnetic actuator based on Micro Electron Mechanics System(MEMS) is introduced.

This paper introduces a new technology to fabricate a micro electromagnetic actuator with high energy density without an enclosed magnetic circuit.

The micro electromagnetic actuator without enclosed magnetic circuit is fabricated by DE-LIGA technologies on the silicon wafer,the body of micropump contains two nozzle/diffuser elements and a PDMS(polymethylsiloxane) membrane with embedded permanent magnet.