The control object in a single-freedom silicon micromachined vibratory gyroscope is the proof mass,because of system structure,feedback control is the only choice to control the proof mass.

A differenfial equation model has been established to represent the interrelationship between θ and φ using Euler s dynamics equation,θ is the angle between the base and the driving wheel of the micromachined vibratory wheel gyroscopes, and φ is the angle between the driving wheel and the outer frame of the micromachined vibratory wheel gyroscopes.

In this paper, the work principle of the micromachined vibratory wheel gyroscopes is introduced, the sketch of the structure and the figure of the work principle of the micromachined vibratory wheel gyroscopes is given.

The structural components of the silicon vibrating wheel micromechanical gyroare described.

Study on viscous damping is critical for the design of silicon micromechanical vibratory gyroscopes.

This paper gives the dynamic equations of vibratory wheel silicon micromechanical gyroscope and their motion law, analyses drifts of the gyroscope,when vehicle rotates around any axis uniformly.