A silicon-based micro direct methanol fuel cell(μDMFC)was presented in this paper,which bears the characteristics of simple configuration,small size and high specific power densities.

Research progress on application of porous silicon in micro fuel cells;

Research and development of micro fuel cells;

MEMS-based micro fuel cell and its air supplying method by piezoelectric fan;

Several problems,such as poor micro-machinability of graphite,corrodibility and high density of metal,rise when the conventional materials such as graphite and metal applied in micro fuel cells.

Based on development state of various micro power sources at home and abroad and their researching results,the feasibility of micro fuel cells fabricated by MEMS (micro electro mechanical system) silicon bulk fabrication is analyzed in theory.