In order to solve the design problem of larger opening and closing start electric current and unsatisfied opening speed of permanent magnetic actuator with long stroke,the concept of four coil double steady state permanent magnetic actuator is suggested firstly in this paper.

The key technology in the design of ultraprecision stage with large travel and nanometer resolution is discussed,and the design proposal,the material,the guide way,the drive manner,measuring feedback and control system of some ultraprecision stage with large travel at home and abroad are introduced.

A new stepping continuous microactuator which is driver is drove by piezoelectric is developed based on tribology principle for resolving the contradiction of large-stroke and high-resolution in Macro/micro drive, its stroke is about 300 ㎜, the resolution is 0.