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1)  ELA
准分子激光晶化
1.
,the metal-induced lateral crystallization(MILC),excimer laser annealing(ELA) and inductively coupled plasma CVD(ICP-CVD),with their advantages and disadvantages compared wi.
本文系统介绍了低温多晶硅薄膜的三种制备方法—金属诱导横向晶化法、准分子激光晶化法和电感耦合等离子体化学气相沉积法的原理和研究进展,比较了它们之间各自的优缺点,最后对该领域的发展前景进行了展望。
2.
The principles and progress of LTPS preparation methods including metal induced lateral crystallization(MILC),excimer laser annealing(ELA),catalytic chemical vapor deposition(Cat-CVD) and inductively coupled plasma chemical vapor deposition(ICP-CVD) were systematically introduced.
系统介绍了金属诱导横向晶化法、准分子激光晶化法、触媒化学气相沉积法(Cat-CVD)以及电感耦合等离子体化学气相沉积法(ICP-CVD)制备低温多晶硅薄膜的原理及进展。
2)  metal induced excimer laser annealing crystallization
金属诱导准分子激光晶化
3)  Excimer laser annealing
受激准分子激光退火(激光再结晶)
4)  Excimer laser
准分子激光
1.
The quality study on excimer laser-induced electrochemical etching of silicon;
准分子激光电化学刻蚀硅的刻蚀质量研究
2.
Experimental research of micromachining silicon by excimer laser ablation in air and under water;
水辅助准分子激光微加工硅的实验研究
3.
Study on a method of improving the quality of excimer laser drilling;
提高准分子激光打孔质量的方法研究
5)  Eximer laser
准分子激光
1.
Methods Using MEL-70 eximer laser and the matched system of topography supported customized ablation to treat refractive error of compound myopi and astigma in 30 eyes.
目的探讨角膜地形图引导准分子激光个性化切削手术设计方案及其可靠性。
2.
This paper reports the experimental study on the pulse duration stability of stimulated Brillouin scattering in cyclohexane pumped with XeCl eximer laser.
本文用XeCl准分子激光作为泵浦光源 ,对环己烷中的受激布里渊散射脉宽起伏进行了实验研究 。
6)  excimer [英][ek'saimə]  [美]['ɛksəmɚ]
准分子激光
1.
Clinical observation on excimer laser for myopic anisometropia;
准分子激光治疗屈光参差的临床观察
2.
OBJECTIVE: To evaluate the result of excimer laser in situ keratomileusis LASIK for correction of high myopia.
目的 :评价准分子激光原位角膜磨镶术 (Lasik)治疗高度近视的效果。
补充资料:准分子激光器
分子式:
CAS号:

性质:用激基复合物为工作介质时得到的脉冲式相干辐射光源。更恰当的名称应当是激基复合物激光器。典型的激光介质有稀有气体的卤化物(如Xe-Cl,KrF等)。发射波长在紫外区。

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