Fabrication of Z-axis micromachined gyroscope with DDSOG process;

Owing to their advantages in miniaturization, cheapness, batch fabrication and high volume of civil and military applications, micromachined gyroscopes are of the most attractive MEMS devices.

Many efforts will been spent in researching low cost, small size, and modest performance micro-machined gyroscopes.

Current analog signal detecting technology of the micro-machined gyroscope is discussed.

This paper introduces a improved vibrating wheel micromechanical gyroscope designed by W.

In order to improve the output signal s sensitivity of micromachined vibratory gyroscope,the frequency of the driving voltage is required to be equal to the resonant one of the gyroscope s driving mode.

A differenfial equation model has been established to represent the interrelationship between θ and φ using Euler s dynamics equation,θ is the angle between the base and the driving wheel of the micromachined vibratory wheel gyroscopes, and φ is the angle between the driving wheel and the outer frame of the micromachined vibratory wheel gyroscopes.

In this paper, the work principle of the micromachined vibratory wheel gyroscopes is introduced, the sketch of the structure and the figure of the work principle of the micromachined vibratory wheel gyroscopes is given.