1) convex corner compensation
凸角补偿
1.
Dimension of convex corner compensation and a newmethod of avoiding corner undercutting in etching of Si;
硅的凸角补偿尺寸及腐蚀中避免削角的新方法
2.
To acquire intact mass structure with better symmetry,various methods of convex corner compensation were studied based on a sort of accelerometer of beam-mass structure.
以一种梁-质量块结构的加速度计为模型,为了在加工过程中,得到完整的质量块结构,使结构具有更好的对称性,对各种凸角补偿方式进行了研究。
3.
Based on new wet etching conditions and a novel convex corner compensation design, a silicon mold with smooth etched surface and perfect convex corner was obtained.
基于一种新的湿法刻蚀条件和新型的凸角补偿结构,以KOH溶液为腐蚀液,对单晶(100)Si材料进行了湿法刻蚀,获得了表面平整和凸角完整的刻蚀结果,制作了用于微模塑工艺的硅基阳模,并成功地用于聚甲基乙烯基硅氧烷微分析芯片的制作上。
3) Pour angle compensation
倾角补偿
5) corner undercutting compensation
削角补偿
6) horn balance
突角补偿
补充资料：凸凸
1.高出貌。
说明：补充资料仅用于学习参考，请勿用于其它任何用途。
参考词条