The characteristics,synthesis method and application of the fluorine containing silane and its polymer,especially fluorine containing monomer,were introduced.

At a certain mass fraction of fluorine-containing siloxane, the performance of high laser damage threshold is not affected obviously.

This paper,setting out from two primary conditions(roughness and low surface energy)of lyophobicity,briefly explains the forming course of micro/nano-compound fine structure by using chemistry corrode and aluminum anodizing methods,introducs the low surface energy film forming craft of fluoroalkyl silane.