TiN/TiCN multilayer films have been deposited on HSS,SS and Cu substrates by arc ion plating (AIP) at different biases with other parameters kept constants.

Investigation of Co/Si/Ti/Si and Co/Si…/Ti/Si Multilayer Solid Phase Reaction Applied in Self\|Aligned Elevated Silicide Structure;

Based on the design theory of soft X-ray optical multilayer thin films and magneto-optic multilayer thin films, the metal multilayer thin films for the reflection of soft X-ray and ultraviolet ray, as well as the magneto-optic multilayer thin films for the magneto-optical memories were constructed.

In the inertial control fusion ( ICF) physics experiment, the Al film and metal multilayer films are in common use types of target.

A method for calculating reflection factor of multilayer thin film on metallic background is deduced by calculating characteristic matrix of multilayer thin film structure and using microwave network ideas.

After getting rid of the interference of RF, automatically rotation speed controlled layer thickness is realized, which not only can accurately fabricate ultra thin multilayers, but also can record the thickness of every layer and automatically change rotation speed and automatically stop rotation after fabrication is over.

The results show that comparing with pure BiFeO3 film,the BiFeO3/Bi4Ti3O12 multilayer film has lower leakage current and show more intense ferroelectricity.