The paper first gives a brief introduction to the concept of nanometer, nanostructure, nano-functional films, etc.

Titanium dioxide photocatalytic thin film is a kind of functional film to which many attentions are paid by many researchers at present.

TiO2 functional film was prepared through solgel process.

The classification, variety and characteristics of functional thin films were stated in this paper.

In this paper, we introduce briefly the principle,the characteristics and the advantages of this technique and review its intensive applications in the study of functional thin films.

Many functional thin films are involved in the structure of TEFL device, and the properties of TFEL device are attributed to the materials and the fabrication methods of functional films.

A new way called chemically modified sol-gel method for preparing patterned functional films is introduced.

The fine-patterning process of semiconductors with silica as the representative has reached the level of submicron even nanometer scale, while the fine-patterning process of functional films, derived from that of semiconductors, is by now still far more behind that level.

Ion beam epitaxy(IBE) technology is a significant method for preparing high pure and high quality rare-earth functional films at low growth temperatue.