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1)  differential vacuum seal
差分密封
1.
The differential vacuum seal for the vertical scanner is calculated and designed in this article,the result show that the vertical scanner has the feature of non-friction and very little gas leakage, hence which can satisfy the high vacuum need and metal contaminated need for the chamber in the wafer process.
文中针对垂直扫描机构进行了差分密封的设计和计算,结果显示,此垂直扫描机构具有无摩擦、漏气率小的特点,因此它能满足晶片处理过程中对靶室高真空度及金属颗粒的要求。
2)  seal pressure differential
密封压差
1.
The method for computing the seal pressure differential of both single-stage and multi-stage seals was presented.
所设计的多极-多级密封装置的密封压差可达1。
3)  seal water pressure difference
密封水压差
4)  differential pressure of sealing water
密封水差压
5)  differential seal
差速器密封
6)  split mechanical seals
剖分密封
补充资料:差分模式
分子式:
CAS号:

性质:在红外光谱分析中,当所记录的某特征吸收,与两个振动频率能级间的能量差,恰好对应一致,则称为差分模式。此外,如果某个处于受激振动态的分子,又吸收(或释放)另外的辐射能,其振动模式则变更为另一振动能级,最后所测吸收应为两者之代数和。

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