1) vertical scanner
垂直扫描机构
1.
The differential vacuum seal for the vertical scanner is calculated and designed in this article,the result show that the vertical scanner has the feature of non-friction and very little gas leakage, hence which can satisfy the high vacuum need and metal contaminated need for the chamber in the wafer process.
垂直扫描机构是单晶片离子注入机靶盘的支撑部件,起着将高速直线运动从靶室外传递到靶盘的作用。
2) vertical scanning
垂直扫描
1.
A vertical scanning white-light measurement system was designed to measure the profile characteristic of micro electro mechanical systems(MEMS) based on vertical scanning white-light interferometric measurement principle.
利用白光干涉垂直扫描原理,设计了测量微机电系统(MEMS)表面形貌特征的垂直扫描白光干涉系统。
2.
This paper presents a novel precision three-dimensional platform based on vertical scanning that has practical application in surface topography measurement.
介绍了一种新型的基于垂直扫描的精密三维工作台,由一个自带计量系统的二维工作台和一个垂直扫描工作台组成。
3) vertical scanning
垂直扫描，纵扫描
4) perpendicular scanning chord
垂直扫描弦
1.
In order to describe the object s shapes steadily by chordal distribution in object s region,region main chord and it s perpendicular scanning chords were defined firstly in the paper and their computation method was put forward.
为了通过目标区域内弦的分布稳定地描述目标的形状特征,首先定义了区域主弦和基于主弦的垂直扫描弦。
5) vertical scanning interferometry
垂直扫描法
1.
In this paper,the interferograms being got value from the micro system analyzer are analyzed using vertical scanning interferometry,and the 3D surface profile of the micro step structure is reconstructed.
垂直扫描法可以重构微系统中微纳结构的表面形貌,更适合具有台阶结构的微纳结构,其分辨率高、解算速度快、精度较高。
补充资料：扫描电子显微镜(见扫描电子显微术)
扫描电子显微镜(见扫描电子显微术)
scanning eleetron mieroseoPe
扫描电子显微镜scanning eleetron mieroseope见扫描电子显微术。
说明：补充资料仅用于学习参考，请勿用于其它任何用途。
参考词条