1) dissolution inhibitor
阻溶促溶剂
2) dissolution inhibitor
阻溶剂
1.
Especially,the resist componet such as matrix polymer,photo acid generator and dissolution inhibitor are discussed in detail.
综述了近十年来DUV抗蚀剂体系的进展 ,特别对DUV区化学增幅抗蚀剂的矩阵树脂、产酸源、阻溶剂作了详细的阐述。
3) digestion retarting mechanism
阻溶机理
4) inhibitational/accelerational resin
阻溶促溶树脂
补充资料:鄙促
1.鄙陋局促。
说明:补充资料仅用于学习参考,请勿用于其它任何用途。