Study on ultra-precision bonnet tool polishing method;

Analysis of the positioning accuracy of ultra-precision stage with air-thrust bearings;

Control Technology of Ultra-precision Planar Motor;

Development of a two-dimensional ultra precision positioning system with nanometer resolution;

Study on the technology of the ultra precision machining for the large-aperture optical flats;

Motion control system of an ultra precision wafer stage with application to integrated circuit production was presented.

The paper analyzes briefly the development state of the diamond ultraprecision turning tool technology.

The requirement of machining technology of aspheric surface optics parts by NC machine with Nanosys--300 aspheric surface ultraprecisioncompound machining system for single point diamond turning (SPDT) is introduced.

In ultraprecision machining, multi probe methods are widely used for measuring the straightness error of the workpiece to separate the straightness motion error of the carriage.

Production of 1-butene with catalytic distillation and super precise distillation and its improvement;