Control the optical and electrical properties of VO_2 thin films during preparation process;

The study of VO_2 thin film on spectra ranging from visible light to infrared light at high and low temperatures is also introduced.

VO_2 thin film have a bright application future in many fields such as intellectual window which can change the temperature automatically,laser protective film,infrared detector,optical data shortage material.

The pure VO_2 thin films and V_2O_5 thin films which undergone difference techniques and annealing processes were fabricated on glass substrates by the method of inorganic SOL-GEL from V_2O_5 powder,and the best preparing process was chosed,the preparing process on Si substrates was also researched,and we got the better method to prepare the VO_2 pure films.

In this paper, VO_2 thin films is prepared by radio frequency magnetron sputtering and annealed at different temperature in argon atmosphere.